A. SERDAR SEZEN'S RESEARCH INVOLVEMENTS
1. Design and Implementation of A MEMS Absolute Angle Measurement Sensor
   
  MEMS gyroscopes are typically designed to measure angular rate of rotation. A measurement of the angle itself is useful in many applications but cannot be obtained by integrating the angular rate due to the presence of bias errors which cause a drift. This project presents an innovative design for a vibrating gyroscope that can directly measure both angle and angular rate.  Devices have successfully been fabricated and one device is shown below: (Movie links are below)
 

The design is based on the principle of measuring the angle of free vibration of a suspended mass with respect to the casing of the gyroscope which is connected on the moving object to be measured.

All fabrication processes have been handled at the Nano Fabrication Facility of the University of Minnesota. ICED layout editor was used in the mask design.

MOVIES
No coupling between the two axes
  This movie shows the two axes (x and y) of the gyroscope. X-axis is actuated by a sinusoidal voltage of 6V @2 Hz. There is no visible coupling between the x- and y axes since y axis does not move under the influence of the motion in x.
A frequency sweep between 1-20 Hz
  This movie shows the open loop response of one of the axes of the gyroscope under a sinusoidal frequency sweep from 1 to 20 Hz.
Two axis performance
  This movie shows a close-up shot of the comb drives on both of the axes. The frequencies of oscillation for the two axes are different and being changed through the movie having values ranging from 1 - 8 Hz. Again there is no coupling.
Bird's Eye View
  Here is a movie shot by using a smaller magnification lens so it gives a better view of the whole device itself.
Springs and Mass
  This movie shows the movement of the springs and the mass at a corner of the device. Two axes are first actuated at the same frequency and the horizontal axis then abrubtly dropped to 1 Hz.
 

Several critical challenges have to be handled before the theoretical sensing concept can be converted into a reliable practical sensor. These include compensating for the presence of dissipative forces, mismatched springs, cross-axis stiffness and transmission of rotary torque.

These challenges are addressed by the development of a composite nonlinear feedback control system that compensates for each of the above effects and ensures that the mass continues to behave as a freely vibrating structure. Theoretical analysis and simulation results presented in the paper show that the gyroscope can accurately measure both angle and angular rate for low bandwidth applications.
   
2. Non-linear Control of a MEMS Electrostatic Comb Drive Actuator for Pull-in Range Extension

Pull-in instability limits the travel distance of elastically suspended parallel-plate and transverse comb-drive electrostatic microactuators to approximately 1/3 of the undeflected gap distance. This instability is due to the electrostatic force increasing more rapidly than the spring force. It is desirable to increase the controllable travel range of an electrostatic microactuator beyond this 1/3 limit for applications that require high fill factors. Several methods have been suggested to extend the controllable travel range by using a multiphase piecewise linear mechanical flexure, by adding additional circuitry, by incorporating an on-board folded capacitor on the device. A control law was also proposed but no experimetal results on fabricated devices were reported.

This project involved the design of a non-linear control strategy to increase the pull-in range and implementation of it on a fabricated micro-actuator. Detailed information on this project can be found in this publication which includes experimental results using a non-linear model inversion technique to extend the travel range to 3.7 um. without pull-in over a 5.4 um gap between the comb fingers. This approach of extending the travel range does not require additional hardware and device area and does not futher complicate the fabrication processes.

   
3. Development of An Interactive Visual Object Oriented Planar Mechanism Synthesis and Analysis Program
 
 

The first thing to handle in machine design, is the design of mechanisms for a given motion. In this study, an interactive computer software package (Quad-Link) for the solution of the classical mechanisms design problems such as motion, path and function generation, is explained. After taking the necessary design inputs from the user, the program plots the Burmester (center and circle point) curves. The type, dimensions and joint coordinates of the four-bar mechanism solutions due to the given prescriptions are determined and displayed. Any solution can be analyzed for the kinematic entities including velocity, acceleration and transmission angle and animated by using the analysis and animation options of the program. This program is capable of handling three and four multiply seperated position cases.

   
4. Asynchronous Teaching of Mechanical Engineering Topics Through The Web
 
 


Web-based education has been rapidly increasing in the world in recent years. This kind of education can be accomplished not only by enabling the instructor to contact the student remotely over the internet in an interactive manner, but also by supplying the course material which is prepared by using computer tools, as a supporting material for the course which is given by the instructor in the student's current institution. In this way both the education can be broad in content and it will be possible to cover the topics which cannot be covered in regular courses. As motion is the most important aspect of the mechanisms study, it's hard to give this motion concept in classical blackboard education and the usage of expensive and a few number of models is in general not sufficient.. The textbooks are capable of explaining the topics to the students only by means of pictures and texts, hence it has a limitted effect on the students. In this work, a web-based package prepared for the mechanisms course is explained.