Multi-axis MEMS Accelerometer
Sponsoring Organization
Honeywell
Inc., Minneapolis, MN
Major Contributors
Peter
Schiller: Principal
Electrical Engineer
David
Wulfman: Mechanical
& Thermal Design Engineer
Angela
Drexler: Fabrication
Engineer
A multi-axis accelerometer was developed for purposes of in
situ mechanical
monitoring and failure anticipation in industrial applications. The sensor was mechanically optimized
for multi-axial sensitivity, resonance exclusion, and thermal noise reduction
through combined analytical and finite element analysis with the aid of ANSYSTM. Due to non-disclosure agreements with
the sponsoring company, no further details may be discussed.